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EPI Wafer

Epitaxial-growth means the crystal growth being conducted on crystal of substrate and disposed in accordance with foundation of substrate crystal phase. Homoepitaxial means the growth of the same material as the substrate while heteroepitaxial means the growth of the different material from the substrate. Substrate wafer on which single crystal thin film deposited by epitaxial growth are generally called as epi wafer. Silicon epi wafers are utilized for element of diode and transistor or substrate for IC such as bipolar type and MOS type.

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